The equipment adopts a box structure, the vacuum system is located behind, and the overcurrent parts are all made of SUS304 vacuum argon arc welding; the vacuum system uses a molecular pump system, which has a faster pumping speed, higher efficiency, and a cleaner coating environment; magnetic fluid sealing technology, The transmission is stable and reliable, and the durability is better. The stainless steel armored heater is used for baking, the baking temperature is up to 350 ℃, and PID control is used. The good man-machine interface and the world-class electrical components can be used to achieve manual and automatic free switching. It is suitable for universities, research institutes and enterprises for process research and development and small-scale production, and can be customized according to customer process requirements.

    Optional configuration: On-line quartz film thickness monitoring system, SQC310; E-type electron beam evaporation source, single or double guns can be selected according to need; vacuum system front stage is dry oil-free clean vacuum system; evaporation boat can be selected as cavity or ring crucible ; Ion bombardment cleaning system; planetary workpiece clamping system.

     Note: According to user requirements, the company is willing to jointly develop with customers and share intellectual property rights. The company is committed to perfect matching of technology and equipment.