This equipment has independent intellectual property rights of ultra-high vacuum magnetron sputtering coating machine, which can realize co-sputtering, DC and RF compatible. The magnetron targets can be sputtered separately or co-sputtering.
详细信息
This equipment has independent intellectual property rights of ultra-high vacuum magnetron sputtering coating machine, which can realize co-sputtering, DC and RF compatible. The magnetron targets can be sputtered separately or co-sputtering; meet alloy film, single layer Needs for films, multilayer films, conductive films, non-conductive films, and reactive sputtering. It is especially suitable for colleges and universities, research institutes and enterprises for process research and development, teaching experiments and new product development, and can be customized according to the actual process requirements of customers. Equipment composition: vacuum chamber, vacuum system, workpiece tray system, baking system, magnetron sputtering system, ion bombardment system, DC / RF power supply, aeration system, online measurement system, circulating water system and equipment control system.
According to the actual needs of customers, modules can be added or removed to achieve effective equipment utilization, while considering equipment scalability and economy.
Optional configuration: online film thickness monitoring system; vertical sputtering and co-sputtering compatible; substrate baking temperature up to 800 degrees Celsius, to meet the needs of vacuum in-situ annealing or atmosphere protection annealing of some materials; evaporation coating and magnetron sputtering Compatible; dry oil-free clean vacuum system; online ion bombardment cleaning; automatic baffle and manual baffle; combined form of DC power source RF power source.
Special note: According to the user's different working conditions and process requirements, the company is willing to jointly develop with the customer and share intellectual property rights. The company is committed to the perfect match of technology and equipment.
